| Record ID | marc_loc_2016/BooksAll.2016.part14.utf8:185371401:766 |
| Source | Library of Congress |
| Download Link | /show-records/marc_loc_2016/BooksAll.2016.part14.utf8:185371401:766?format=raw |
LEADER: 00766nam a2200229 a 4500
001 83022351
003 DLC
005 19840713000000.0
008 840702s1984 nyua b 00100 eng
010 $a 83022351
020 $a0122341082 (alk. paper)
050 0 $aTK7874$b.V56 vol. 8
082 0 $a621.381/73$219
245 00 $aPlasma processing for VLSI /$cedited by Norman G. Einspruch, Dale M. Brown.
260 0 $aNew York :$bAcademic Press,$c1984.
300 $axiv, 527 p. :$bill. ;$c24 cm.
440 0 $aVLSI electronics ;$vv. 8
504 $aIncludes bibliographies and index.
650 0 $aIntegrated circuits$xVery large scale integration.
650 0 $aPlasma (Ionized gases)$xIndustrial applications.
700 10 $aEinspruch, Norman G.
700 10 $aBrown, Dale M.