An edition of Vsli Electronics Microstructure Science (1987)

Vsli Electronics Microstructure Science

Lithography for Vlsi (VLSI electronics)

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Cover of: Vsli Electronics Microstructure Science by Norman G. Einspruch, Norman G. Einspruch
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Last edited by MARC Bot
December 20, 2025 | History
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An edition of Vsli Electronics Microstructure Science (1987)

Vsli Electronics Microstructure Science

Lithography for Vlsi (VLSI electronics)

by

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Publish Date
Publisher
Academic Pr
Language
English
Pages
361

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Edition Availability
Cover of: Vsli Electronics Microstructure Science
Vsli Electronics Microstructure Science: Lithography for Vlsi (VLSI electronics)
September 1987, Academic Pr
Hardcover in English
Cover of: Vsli Electronics Microstructure Science
Vsli Electronics Microstructure Science: Lithography for Vlsi (VLSI electronics)
September 1987, Academic Pr
in English

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Book Details

The Physical Object

Format
Hardcover
Number of pages
361

Edition Identifiers

Open Library
OL9281291M
ISBN 10
0122341163
ISBN 13
9780122341168
Goodreads
5615650

Work Identifiers

Work ID
OL7939624W

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Download catalog record: RDF / JSON / OPDS | Wikipedia citation
December 20, 2025 Edited by MARC Bot set source_records based on initial machine_comment
April 24, 2010 Edited by Open Library Bot Fixed duplicate goodreads IDs.
April 16, 2010 Edited by bgimpertBot Added goodreads ID.
April 14, 2010 Edited by Open Library Bot Linked existing covers to the edition.
April 30, 2008 Created by an anonymous user Imported from amazon.com record