An edition of Plasma processing for VLSI (1984)

Plasma processing for VLSI

by and

Cover of: Plasma processing for VLSI by Norman G. Einspruch, Dale M. Brown
Locate

My Reading Lists:

Create a new list
Notes
Notes

Check nearby libraries

Buy this book

Last edited by ImportBot
April 21, 2025 | History
Edit
An edition of Plasma processing for VLSI (1984)

Plasma processing for VLSI

by and

This edition doesn't have a description yet. Can you add one?

Publish Date
Publisher
Academic Press
Language
English
Pages
527

Check nearby libraries

Buy this book

Subjects

Plasma (Ionized gases), Very large scale integration, Industrial applications, Integrated circuits
Edition Availability
Cover of: Plasma Processing for VLSI
Plasma Processing for VLSI
2014, Elsevier Science & Technology Books
in English
Cover of: Plasma processing for VLSI
Plasma processing for VLSI
1984, Academic Press
in English

Add another edition?

Book Details

Edition Notes

Includes bibliographies and index.

Published in
New York
Series
VLSI electronics ;, v. 8

Classifications

Dewey Decimal Class
621.381/73
Library of Congress
TK7874 .V56 vol. 8

The Physical Object

Pagination
xiv, 527 p. :
Number of pages
527

Edition Identifiers

Open Library
OL3179753M
ISBN 10
0122341082
LCCN
83022351
LibraryThing
1452712
Goodreads
3756366

Work Identifiers

Work ID
OL19174285W

Source records

Community Reviews (0)

No community reviews have been submitted for this work.

Lists

History

Download catalog record: RDF / JSON / OPDS | Wikipedia citation
April 21, 2025 Edited by ImportBot Redacting ocaids
October 28, 2020 Edited by MARC Bot import existing book
July 8, 2019 Edited by MARC Bot import existing book
March 11, 2019 Edited by MARC Bot import existing book
April 1, 2008 Created by an anonymous user Imported from Scriblio MARC record