An edition of Plasma processing for VLSI (1984)

Plasma processing for VLSI

by and

Cover of: Plasma processing for VLSI by Norman G. Einspruch, Dale M. Brown
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Last edited by MARC Bot
March 11, 2019 | History
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An edition of Plasma processing for VLSI (1984)

Plasma processing for VLSI

by and

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Publish Date
Publisher
Academic Press
Language
English
Pages
527

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Subjects

Plasma (Ionized gases), Very large scale integration, Industrial applications, Integrated circuits
Edition Availability
Cover of: Plasma Processing for VLSI
Plasma Processing for VLSI
2014, Elsevier Science & Technology Books
in English
Cover of: Plasma processing for VLSI
Plasma processing for VLSI
1984, Academic Press
in English

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Book Details

Edition Notes

Includes bibliographies and index.

Published in
New York
Series
VLSI electronics ;, v. 8

Classifications

Dewey Decimal Class
621.381/73
Library of Congress
TK7874 .V56 vol. 8

The Physical Object

Pagination
xiv, 527 p. :
Number of pages
527

Edition Identifiers

Open Library
OL3179753M
ISBN 10
0122341082
LCCN
83022351
LibraryThing
1452712
Goodreads
3756366

Work Identifiers

Work ID
OL19174285W

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March 11, 2019 Created by MARC Bot import existing book